ARRAY TYPE ULTRASONIC PROBE

摘要

PURPOSE:To permit effective use of the high acoustic impedance of tungsten/ epoxy and to obtain a probe having high distance resolving power by providing aluminum nitride as an insulator between a packing material and oscillators. CONSTITUTION:The insulating plate 4 is provided between the tungsten/epoxy packing material 1 and plural pieces of the oscillators 2 provided with electrodes 3 and a matching layer 5 is attached to the surface of the oscillators 2. Production of the probe is executed by adhering the insulating plate 4 to the packing material 1, previously providing the electrodes 3 of the number corresponding to the prescribed number of elements or channels and adhering a piezo-electric ceramic substrate subjected to polarization to the plate 4. The assembly is then cut at prescribed intervals to obtain plural pieces of the oscillators 2. The matching layer 5 is further adhered to the oscillators 2. Since the tungsten/ epoxy is effectively utilized to realize the high distance resolving power, the distance resolving power is improved.