| 摘要 |
PURPOSE:To perform short-circuit detection with high reliability at low cost by moving a prober consisting of a couple of probe styli by a stepping motor. CONSTITUTION:A table 22 where glass 21 for a liquid crystal panel is positioned and fixed is elevated to prescribed height and pressed against the probe styli 12 and 13 which stand by at sweep start points 23. A prober moving table 15 where the prober 14 with the probe styli 12 and 13 is fitted and fixed is moved in the pressing state to a sweep end point 25 in a sweep direction 24 with the driving force of a stepping motor 17 through a transmission gear 18, a ball screw 19, and a guide shaft 16. Then whether or not respective adjacent electrode patterns 20 short-circuit is detected during the movement. The table 22 is lowered to its original position after the prober moving table 15 moves to the sweep end point, and the prober moving table 15 then moves in the opposite direction from the sweep direction 24 to return to the sweep start point 23. Then, if it is decided that the liquid crystal panel 21 has a short circuit, it is taken out of the process and when it is decided that there is no short-circuit, the panel is sent to a next stage.
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