| 摘要 |
PURPOSE:To enhance resolution in the sample direction by making proton beams via an acceleration tube pass through a slit or Q lens with a small aperture. CONSTITUTION:Proton beams coming from an ion source A advance through a vacuum space and are curved at right angles by a magnet B. Successively, the beams pass through an accelerating tube C in an adjustable speed tube part 3 so as to be accelerated and they pass through a slit 1 with an small aperture 14. Thus, very thin proton beams can be obtained. This slit can be replaced for a Q lens. Thereafter, the proton beams are deflected by a vertical scanning electrode 2 and a horizontal scanning electrode 4 and they impinge on a sample. Secondary electrons scattered from this impinging point are scanned by the electrodes 4 and 2, and they pass through the aperture 14 and the adjustable speed tube part 3 then functioning as a deceleration tube D, and they are curved by magnets E and F, and their energy Ea is measured by an analyzer G. Hence, resolution in the sample direction of a method of proton energy loss spectral analysis can be upgraded.
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