| 摘要 |
<p>PURPOSE:To reduce operation power by supplying gas from the second holder without operating a compressor when the downstream side pressure of the first holder is within a defined range. CONSTITUTION:Gas is supplied to the first holder 27 from a line 26, and an opening/closing valve 31 is interposed between a line 30 connected to a junction 46 on the downstream side of the first holder 27 and the second holder 29. When the pressure at the junction 46 is more than a defined pressure, the opening/closing valve 31 is opened so as to charge up excess gas in the second holder 29. In addition, when it is within a defined pressure range, a compressor 33 does not operate so that the gas from the second holder 29 is supplied through a check valve 32. Accordingly, the motive power of the compressor can be reduced.</p> |
