| 摘要 |
PURPOSE:To stabilize discharge by mounting an auxiliary electrode adjacent to main electrodes on the outer circumference of a discharge tube and generating auxiliary discharge among the main electrodes and the auxiliary electrode in addition to main discharge generated between the main electrodes. CONSTITUTION:An auxiliary electrode 3 is set up adjacent to a main electrode 21 on the outer circumference of a discharge tube 1, and auxiliary discharge is generated between the main electrode 21 and the auxiliary electrode 3 in addition to main discharge generated between main electrodes 21, 22. The characteristics of a laser output W to currents I steeply elevate to a point (b) corresponding to a fixed voltage value at a point (a); the oscillation of laser beams is started when currents I are increased from 0, and the laser output is augmented along the path of b-c with the enlargement of currents. The laser output is reduced with decrease along the path of b-c of currents, but the laser output do not lower steeply to 0 even after currents pass through the point (b). Accordingly, the laser output is maintained, and the laser output is transferred toward a laser output 0 while being slowly diminished along a path (d) with the reduction of currents. |
