发明名称 HIGH-FREQUENCY DISCHARGE EXCITING LASER DEVICE
摘要 PURPOSE:To prevent the generation of leakage currents by mounting a conductor for a short circuit connecting a predetermined low potential point in an electrode and a section comparatively adjacent to a low potential point in a discharge tube supporter. CONSTITUTION:A conductor 7 for a short circuit connecting the central section of an electrode 22 at a low potential point in electrode 21, 22 and a metallic position 421 comparatively adjacent to the prescribed position of the central section of the electrode 22 in a strut 42 for supporting a discharge tube is set up. A phenomenon in which residual charged particles with discharge intend to leak toward the direction of a discharge-tube support box body 41 in the discharge tube 1 and in which parasitic discharge develop toward the inside of the discharge-tube support box body 41 from electrode sections in the discharge tue 1 to cause large currents intend flow toward a grounding point is prevented by the conductor 7 for the short circuit. Accordingly, safety and stability on operation are improved.
申请公布号 JPS63158886(A) 申请公布日期 1988.07.01
申请号 JP19860305534 申请日期 1986.12.23
申请人 FANUC LTD 发明人 EGAWA AKIRA
分类号 H01S3/097;H01S3/03;H01S3/0975 主分类号 H01S3/097
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