| 摘要 |
PURPOSE:To widen an adjustment range without deteriorating a heat generating resister layer, by oxidizing the resistor layer before providing a protective layer, monitoring the change in resistance generated by the oxidation, and adjusting the resistance by continuing the oxidation until a predetermined resistance is reached. CONSTITUTION:A heat generating resistor layer 12 consisting of Ta-SiO2 and an electrode layer 13 consisting of Al are laminated on an insulating substrate 11. In a first PEP step, the electrode layer at parts 42 for subsequently providing a heat generating resistor avay 312 is removed, leaving the electrode layer at a part 41 to be a common electrode 311 and parts 43 to be discrete electrodes 313. Then, in a second PEP step, separation into individual heat generating resistors 3121-312n and separation into the discrete electrodes 3131-313n are conducted. Before a protective layer 14 is provided, a second switch 35 is connected sequentially to the discrete electrodes 3131-313n, and the respective heat generating resistors 3121-312n are oxidized by energization from a variable-voltage power source 33. When a resistance meter detect that the resistance of a given one of the resistors reaches a target resistance, the switch 35 is changed over to the discrete electrode for the next resistor, and resistance adjustment is carried out. Thus, a wide of resistance adjustment can be performed without deteriorating the beat generating resistor layer. |
