METHOD AND DEVICE FOR COATING THIN FILM TO INSIDE SURFACE OF STRAIGHT TUBE TYPE TUBULAR MATERIAL

摘要

PURPOSE:To uniformize coating films and to prevent sticking of the films to tube ends, by moving tubular materials back and forth while projecting and injecting a laser beam and gaseous raw material toward the walls of the tubular materials in the same direction. CONSTITUTION:The stock glass tubes 12 in a stocker 17 are imposed on a traveling base 15 and are horizontally moved back and forth by a driving device 16 in such a manner as to swallow and discharge a coating arm 2. The injection of the gaseous raw material for forming the thin films from the arm 2 is so executed that the laser beam precedes the injection. The surface heating of the laser beam and the vapor deposition of the film on the inside surface of the glass tube 12 take place simultaneously and the coating is executed. A vertical moving system is more effective in the case of the long-sized tubular materials. The coating, etc., of conductive films on the inside surface of fluorescent lamps, etc., are executed at the higher speed with the conserved energy and to environmental pollution by this method.