| 摘要 |
PURPOSE:To obtain a high-accuracy pressure transducer which is not affected by temperature by providing a reference light source, an optical branching filter, a phase compensator, a pressure receiving plate, an optical multiplexer, and a photoelectric converter. CONSTITUTION:Light from the reference light source 10 is branched to two directions through the optical branching filter 11, one light beam is made incident from an end part of one of optical waveguides 13b formed on both surfaces of the pressure receiving plate 13, and the other light beam is made incident on the other optical waveguide 13a of the pressure receiving plate through the phase compensator 12. The pressure receiving plate 13 is made of, for example, an Si substrate and the optical waveguides 13a and 13b are formed of SiO2, etc., on both surfaces of the substrate nearly in the centers. Output light beams of the waveguides 13a and 13b are guided to the optical multiplexer 14 and interface with each other. Their interference light is converted by the photoelectric converter 15 into an electric signal. Then the waveguides 13a and 13b are arranged in the same environment, so there is no output variation with temperature and a measurement is taken by utilizing the interference between the light beams, so the high-accuracy pressure transducer is realized. |
