REAL-TIME VOLTAGE CONTROL CIRCUIT FOR LSI MEMORY TESTER

摘要

PURPOSE:To suppress the occurrence of the breakdown accident of an element to be inspected by using data stored in a voltage memory like a subroutine. CONSTITUTION:A CPU inputs voltage data and its address 1 to a voltage data memory 3 prior before a test is conducted because of a special program. Further, a test pattern generator inputs an address 1 which specifies the storage location of voltage data to be applied to the input terminal of the element to the inspected to the memory 3 as a test program advances during the test. Then the memory 3 outputs applied voltage data 4 to be supplied to pin electronics for respective input terminals from the memory 3 with the address 2. This data 4 is converted by a D/A converter 5 into an analog value, and a drive which supplies an input voltage directly to the respective input terminals is formed by a buffer amplifier 6. Thus, the rising and falling of a source voltage which are too steep are controlled property to suppress the occurrent of the breakdown accident of the element to be inspected.