| 摘要 |
<p>An apparatus and process designed for detecting both large and small leaks in components, such as the hermetic seals of electronic components, especially small components. The small component leak detector comprises (i) a container means such as a glove box (14) maintained at about one atmosphere pressure for receiving test objects (12), (ii) a movable probe situated with the glove box for sniffing and capturing samples of detecting gas in proximity to the test object, (iii) an entrainment pump (16) which consists of a getter pump or a modified cryopump located between the sampling probe and the mass detector (18) for measuring the detecting gas, and (iv) a mass detector. The entrainment pump is capable of entrapping a purge carrier gas, such as nitrogen, but not entrapping a detecting gas, such as helium.</p> |
