| 摘要 |
PURPOSE:To supply electric power from the outside of a containing box without applying electric contact, prevent dust and foreign matters from attaching to a wafer, and improve the throughput and the yield of manufacturing, by providing a solar battery on containing box for wafer cassette. CONSTITUTION:A solar battery 3 is arranged on the outside wall of a containing box 1 of wafer cassette, and a box body 7 is provided with a lid 5 capable of opening and shutting. The box body 7 and the lid 5 are made up of plastic and the like. The inside upper parts of the box body is provided with a mechanism 10 to inhale and exhaust the air and a dust filter 12. A wafer cassette 14 is accommodated in a cassette space 16 neighbouring with the filter 12. A box body 20 having apertures in the upper part and the lower part is arranged in the inside of the box body 7. The width and the depth of the former are made smaller than those of the latter, so that an air gap 22 is formed between the box body 7 and the box body 20. A lower aperture 28a and an upper aperture 28b are formed which are linked to the air gap 22. Energy of the battery 3 is converted to high frequency to vibrate an electrostriction element of the mechanism 10, and generates air convection flowing from the inside of the box body 7 toward the outside. |
