发明名称
摘要 PURPOSE:To enable short-time exposure by forming an intermediate layer contg. an absorbing agent for active rays of light and having >=2.5 optical density and by adding no absorbing agent or a small amount of the agent to a photopolymerizing layer. CONSTITUTION:On a transparent support an intermediate layer having >=2.5 optical density in the range of active rays of light is formed by adding an absorbing agent for active rays of light to a high-molecular substance which forms a film and is soluble in an aqueous solvent, e.g., a methyl methacrylate-methacrylic acid copolymer or novolak type phenolic resin. On the intermediate layer a photopolymerizing layer having <1 optical density in the range of active rays of light is formed using a high-molecular substance identical with the substance of the intermediate layer together with the absorbing agent, a photopolymerizing monomer, a photopolymn. initiator and a sensitizer as required. The ratio between the photopolymerizing and intermediate layer in thickness is 1:(1-4), and the preferred thickness of the photopolymerizing layer is 1-5mum.
申请公布号 JPS6332373(B2) 申请公布日期 1988.06.29
申请号 JP19800094313 申请日期 1980.07.09
申请人 TOYO BOSEKI 发明人 KATO YOSHIO;IMAHASHI SATOSHI;IMAI SETSUO
分类号 G03F7/004;G03C1/00;G03F1/00;G03F7/09;G03F7/105;H01L21/027 主分类号 G03F7/004
代理机构 代理人
主权项
地址