| 摘要 |
PURPOSE:To enhance the wear-resistance and shock resistance of a slide member by forming one of the slide surfaces of stationary and movable members from ceramic materials, and by forming the other one of the slide surfaces such that parts of the outer surface of the ceramic material are exposed to the outside within the sputtered layer made of slide materials. CONSTITUTION:A spindle 1 made of a low expansion alloy 10 has a slidable surface on which a sputtered ceramic layer is formed and is mirror-surface- finished. A bearing 3 made of a low expansion alloy 10a has its inner surface in which lattice-like grooves 12 having a depth of about 0.5 mm are formed. A sputtered ceramic layer 13 having a thickness of about 0.5 to 1.2 mm is coated on the inside surface along the grooves 12. Further, a sputtered surface made of a slide material having a hardness lower than that of ceramic materials is formed on the inside of the sputtered ceramic layer 13, and is ground so that parts of the outer surface of the sputtered ceramic layer 13 are exposed to the outside, being spotted in the finished surface 15 about 10 to 15 % of the total area thereof. Accordingly, it is possible to prevent the sputtered ceramic layer 13 from coming off, thereby it is possible to enhance the wear resistance and the shock resistance. |
