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发明名称
APPARATUS FOR AVOIDING SPUTTERING
摘要
申请公布号
JPS63155600(A)
申请公布日期
1988.06.28
申请号
JP19860302915
申请日期
1986.12.19
申请人
ISHIKAWAJIMA HARIMA HEAVY IND CO LTD
发明人
MIYAUCHI YASUYUKI
分类号
H05H7/18;H05H13/04
主分类号
H05H7/18
代理机构
代理人
主权项
地址
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