| 摘要 |
PURPOSE:To independently regulate and control the temperature near the port and the bottom of a crucible in a molecular beam cell by dividing heaters at the front and rear sections of the crucible, and separately controlling the temperatures of the front and rear sections of the crucible. CONSTITUTION:A crucible front section heater wire 5a is wound at the front section of a crucible 7, and connected to a front section heater terminal 2a provided through an insulator at a flange 3. A crucible rear section heater wire 5b is wound at the rear section of the crucible 7, and connected to a crucible rear section heater terminal 2b mounted through an insulator at the flange 3. The temperature of the front section of the crucible 7 is measured by a crucible front section thermocouple 10, and the rear section temperature is measured by a crusible rear section thermocouple 10b. Thus, since the temperatures of the front and rear sections of the crucible 7 are separately measured, the energizations of the heaters 5a, 5b of the front and rear sections of the crucible 7 are independently controlled, thereby separately controlling the temperatures of the front and rear sections.
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