Method of manufacturing heating furnace parts

摘要

A method of manufacturing heating furnace parts having high purity which comprises the steps of molding a raw powder mainly consisting of silicon carbide powder into a prescribed form, and subjecting the molded product to a purification treatment at a temperature ranging between 1,500 DEG and 2,100 DEG C. in an atmosphere containing a gas selected from the group consisting of halogen gas and hydrogen halide gas, and an inert gas applied as a carrier gas.