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发明名称
MECHANICAL CHUCK
摘要
申请公布号
JPS63155799(A)
申请公布日期
1988.06.28
申请号
JP19860303051
申请日期
1986.12.19
申请人
NEC CORP
发明人
MOROTA NOBORU
分类号
B23P19/04;B23Q7/04;B25J15/06;H01L21/677;H01L21/68;H05K13/04
主分类号
B23P19/04
代理机构
代理人
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