摘要 |
PURPOSE:To obtain an oxygen sensor ideal for volume production while making it thinner, by a method wherein a solid electrolyte plate provided with an electrode film at the center thereof, a ring-shaped spacer having an opening at the edge thereof and a seal material are laminated and bonded together and an opening of the spacer is used as an oxygen diffusing hole. CONSTITUTION:Zirconia or the like with yttria added thereto is used to prepare an oxygen ion conducting solid electrolyte plate 1, an electrode film 2 with a high oxygen dissociation/adsorption capacity and a high transport capacity of oxygen dissociated made of platinum, gold, palladium, silver or the like is formed at the center of the surface thereof by screen printing and a leader conductor is provided at a part of the edge thereof. Then, a ring-shaped spacer 5 having a diffusion hole 4 at a part thereof is prepared using a heat resistant PbO-ZnO-B2O3-SiO2 based material in such a manner as to surround the film 2 and laminated on the film 2. Thereafter, the work is covered with a seal material 6 such as zirconia based ceramics with the same thermal expansion coefficient as this 1 and these components are laminated together to obtain an oxygen sensor requiring no boring of a diffusion hole. |