LDD CMOS process

摘要

A process is disclosed for fabricating LDD CMOS structures having a reduced mask count and improved manufacturability. In one embodiment of the invention a CMOS structure is formed having gate insulators overlying N and P type surface regions. Gate electrodes are formed on each of the surface regions and a spacer forming material is deposited over the electrodes and the surface regions. The spacer material is anisotropically etched from one of the surface regions to form spacers at the edge of the first gate electrode while retaining the spacer forming material over the second surface region. Source and drain regions of the first MOS transistor are implanted using the spacers as an implantation mask. The spacers are removed and a lightly doped source and drain is implanted using the gate electrode as a mask. The implanted source and drain regions are oxidized using the remaining spacer forming material as an oxidation mask to prevent oxidation of the second surface region. Devices are then fabricated in that second surface region by implanting devices of opposite conductivity type either with or without the formation of spacers and an LDD structure on the devices of second conductivity type.