| 摘要 |
PURPOSE:To grow a film of good quality uniformly by forming uniform distribution of a temperature on a susceptor by locally heating the susceptor in an equipment by a high frequency coil provided only near the position where the susceptor is located. CONSTITUTION:A magnetic field is generated in a quartz tube 12 and plasma 13 is generated by introducing a microwave 10. In this case, a carbon susceptor 16 for mounting a sample 17 which is provided in the quartz tube 12 is heated by using only a high frequency coil 19 provided near the susceptor 16 outside of the quartz tube 12. The coil 19 generates high frequency 8-10 kHz by setting the number of wirings appropriately with power of 4-10 kw and heats the susceptor 16 nearly uniformly within the range of a temperature 500-1000 deg.C. This enables obtaining the uniform distribution of the temperature above the susceptor 16 and uniformly growing a good quality film.
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