发明名称 |
Multilayer ceramic coatings from silicate esters and metal oxides |
摘要 |
This invention relates to materials produced by diluting in a solvent a preceramic mixture of a partially hydrolyzed silicate ester and a metal oxide precursor selected from the group consisting of an aluminum alkoxide, a titanium alkoxide, and a zirconium alkoxide. The preceramic mixture solvent solution is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO2/metal oxide coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices. |
申请公布号 |
US4753856(A) |
申请公布日期 |
1988.06.28 |
申请号 |
US19870000217 |
申请日期 |
1987.01.02 |
申请人 |
DOW CORNING CORPORATION |
发明人 |
HALUSKA, LOREN A.;MICHAEL, KEITH W.;TARHAY, LEO |
分类号 |
C23C16/32;C23C16/34;C23C16/36;C23C16/50;C23C18/12;H01L21/314;H01L21/316;H01L21/318;H01L23/29;H01L23/31;(IPC1-7):B32B9/00 |
主分类号 |
C23C16/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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