发明名称 SEMICONDUCTOR ASSEMBLING DEVICE
摘要 PURPOSE:To perform the positioning of a collet in a highly precise manner by a method wherein the collet holder is arranged on a tarret concentrically with the supporting axis of each collet, and a positioning member which can be selectively engaged to each holder is provided on each holder on the side of the device main body in a freely going-in-and-out manner. CONSTITUTION:When a collet 6 is positioned, first, a tarret 4 is rotated to the prescribed collet position using the motor located in a device main body 1. The holder 14 holding the prescribed collet 6 is moved to the point necessary for decision of position, and when it is contacted to cam followers 13 and 13, the cam follower 13 is once pressed to the side of the main body by the compressing action of a spring 12. However, the cam follower is returned to the original position by the restoring functioning of the spring 12, and the holder 14 is fixed in a pinched manner. In this case, even when the degree of accuracy of the fixing position is not so high, the positioning can be performed by the holder 14 which is concentrical to the pellet attracting collet 6, and a highly precise reproducibility can be obtained almost in the degree of concentricity of processing of the holder 14.
申请公布号 JPS63153836(A) 申请公布日期 1988.06.27
申请号 JP19860300814 申请日期 1986.12.17
申请人 MITSUBISHI ELECTRIC CORP 发明人 INOUE KENJI
分类号 H01L21/52;B23P19/04;H01L21/677;H01L21/68 主分类号 H01L21/52
代理机构 代理人
主权项
地址