| 摘要 |
PURPOSE:To obtain products having stable quality by composing the title block of a heating block formed of a heat transfer material, a heater housing section attached closely to the lower section of the heat block section detachably and shaped by the heat transfer material, and a plate-shaped ceramic heater housed in the heater housing section. CONSTITUTION:A heat block section 3 has a heat-receiving surface 6 shaped to a plate shape to a lower section thereof, and consists of a heat block 10, to an upper section of which support surfaces 7 supporting substrates 1 and grooves 9 for letting leads 8 for the substrates 1 escape are formed and which is shaped from a heat transfer material, and positioning pins 11 are projected along the upper surface of the heat block 10 and the grooves 9. A heater housing section 4 is composed of a heater receiver 4a formed from the heat transfer material and a plate 4b, and a plate-shaped ceramic heater 5 is housed in the heater housing section 4. A temperature sensor 13 is fitted into the ceramic heater 5, and the state of a temperature is transmitted over a bonding device body.
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