| 摘要 |
PURPOSE:To form a stable and long-life filament, and to shape a diamond film having high reliability by executing pretreatment in which the tungsten filament is heated in hydrocarbon and changed into tungsten carbide. CONSTITUTION:A tungsten filament 11 is set up at a predetermined position in a bell jar 10, and the filament 11 is conducted by a drive power 16 for the filament at the gas pressure of 1 Torr of methane CH4, and heated at a tempera ture of 2000 deg.C, thus turning tungsten into tungsten carbide. By the carbonization treatment of the tungsten filament 11 the electric resistance of the filament comes to have a resistance value approximately quadruple as large as one before the treatment. Space in the bell jar is evacuated to approximately 10<-6> Torr, methane CH4 and hydrogen as raw gases are introduced from a gas introducing pipe 13, and pressure in the bell jar 10 is brought to 50 Torr. Currents are flowed from a power supply 16 at that time of heat the filament 11 at 1800 deg.C. When a substrate 12 is heated at approximately 700 deg.C by a heater 15 for heating the substrate in this case, a diamond is formed onto the Si substrat 12.
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