发明名称 RESONANCE TUNNELING SEMICONDUCTOR DEVICE
摘要 PURPOSE:To make the title device process a differential negative resistance characteristic, which is large in the maximum current density and either of the maximum and minimum current density ratios, by a method wherein the device is provided with a quantum well which is formed on a substrate and has a well layer pinched by barrier layers to be selected from each specified mixed crystal. CONSTITUTION:The title device is provided with a quantum well which is formed on an InP substrate (for example, a semi-insulative InP substrate 1) and has InGaAs well layer (for example, an I-type In0.53Ga0.47As well layer 4) pinched by barrier layers (for example, I-type Al0.48In0.52As barrier layers 3 and 5) selected from each mixed crystal of AlxGayIn1-x-yAs (0<x<=0.48, 0<=y<0.47) or AlxIn1-xAs (0.48<x<=1). As the effective mass of carriers is smaller compared with that in the conventional AlGaAs/GaAs/AlGaAs quantum well, a tunneling probability is augmented, and at the same time, the scattering probability in the barrier layers is decreased.
申请公布号 JPS63153867(A) 申请公布日期 1988.06.27
申请号 JP19870113590 申请日期 1987.05.12
申请人 FUJITSU LTD 发明人 INADA TSUGUO;MUTO SHUNICHI;FUJII TOSHIO
分类号 H01L29/88;H01L29/201;H01L29/205;H01L29/737;H01L29/76;H01L29/86 主分类号 H01L29/88
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