| 摘要 |
PURPOSE:To exactly detect the shape of component whose reflection factors are different, by obtaining a height data, based on two kinds of luminance data based on optical cut images obtained from two directions and two large and small reference levels, at the time of inspecting the packaging state of packaging component by using an optical cutting method. CONSTITUTION:By two line sensors 8, 9, two kinds of optical cut images are detected from two directions, two kinds of (first and second) height data and luminance data based thereon are obtained, and by using these data, a three- dimensional shape data is obtained. In such a packaging component inspecting instrument, when one of first and second luminance data is above a first reference level (corresponding to the level of noise) SL1, and also, the other is above a second reference level (corresponding to a saturation level of the line sensor (SL2, a height data corresponding to a smaller luminance data is selected, and in other case, a height data corresponding to a larger luminance data is selected.
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