| 摘要 |
PURPOSE:To enable a continuous confirmation to be conducted by detecting a variation arisen in a monitor output when an irradiated beam is about to deviate from a fine grain of an analyzed object. CONSTITUTION:An output signal of a X-ray detector 7 is counted in a X-ray signal count device 12 via an amplifier 11, converted into data of a counting rate (X-ray strength), and read to CPU. CPU sends X and Y synchronizing signals to a raster generator 13, makes the raster generator to form scanning signals in a X direction and Y direction, and makes the scanning signal to be inputted into a deflection coil 5 and a signal treatment display device 10. In this case, an appropriate secondary radiation radiated from a sample irradiation point by a micro beam is detected and a detected strength is monitored, a movement of a microbeam irradiation point on a sample is detected by a variation of the detected strength. When the movement is detected, a small area of a sample surface is scanned by the microbeam, a correct irradiation position is detected, and a beam irradiation point is corrected to the position. |
