| 摘要 |
PURPOSE:To reduce the vibration of a scanning needle and a sample by positioning a first actuator for bringing the sample to a fine motion, and a second actuator for moving the scanning needle, so as to face each other in a face symmetry. CONSTITUTION:In the vicinity of both ends of the upper face of a substrate 10, first and second supporting plates 12, 14 are provided vertically. As for a differential micrometer 16, by turning an operating part 16b by a prescribed angle, a tip part 16a moves by a very small distance. Between the supporting plates 12, 14, guide shafts 18, 19 are provided in parallel. A sliding part unit 22 consists of a cylindrical front part 24, a plate-like rear part 26, and a disk 25 for supporting the first actuator 32. To the supporting plate 14, the second actuator 38 is fixed through a fitting plate 36. The actuator 38 is placed so as to become a face symmetry against the actuator 32, and also, substantially the same shape as the actuator 32 and has the same dimension.
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