ECR PLASMA GENERATOR,申请号JP19860300494-传众专利搜索

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发明名称	ECR PLASMA GENERATOR
摘要
申请公布号	JPS63152900(A)	申请公布日期	1988.06.25
申请号	JP19860300494	申请日期	1986.12.17
申请人	RIKAGAKU KENKYUSHO	发明人	TANBA MORITAKE;SAKAMOTO YUICHI
分类号	H05H1/18	主分类号	H05H1/18
代理机构		代理人
主权项
地址

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