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发明名称
摘要
申请公布号
JPS6398648(U)
申请公布日期
1988.06.25
申请号
JP19860193153U
申请日期
1986.12.17
申请人
发明人
分类号
H01L21/60;H01L21/56;H01L23/48;(IPC1-7):H01L23/48
主分类号
H01L21/60
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代理人
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