| 摘要 |
<p>PURPOSE:To exactly detect a multi-layer three-dimensional minute pattern by detecting each different height of an optical cutting line obtained by an optical scan, by two line sensors, and obtaining an optical cut image running along the vertical direction, based on this detected image. CONSTITUTION:An optical scanning means 1 scans on an object to be inspected M on which a pattern P is formed, by a light beam l1, and an optical cutting line is formed on the object M to be inspected. Two line sensors 2a, 2b in a photodetecting means 2 detect successively each different height position of the optical cutting line from each different direction C, D in accordance with the scan of the beam l1, and its detected image is stored in a storage means 3. At the time of reading out the detected image stored in the storage means 3, a read-out control means 4 reads out it by controlling and rearranging its order. In such a way, an optical cut image running along the vertical direction is obtained. From the optical cut image obtained in this way, the three- dimensional shape of the pattern P is detected by a known means.</p> |
