发明名称 APPARATUS FOR MEASURING DIMENSIONS AND COLOR TONE DEVIATION FOR PLATING OF PART
摘要 PURPOSE:To measure deviation in plating and color tone of a part automatically, by a method wherein a part to be measured is photographed by an optical system and the resulting image is converted into an electrical signal, which is compared with a pattern of a reference part. CONSTITUTION:A part, for example, an IC lead frame is photographed by an optical system CCD or the like and the resulting image is converted into an electrical signal, which is displayed on a CRT screen by arithmetic processing. Then, a bright line of a display cursor 15a indicating the position of a pad B of a reference pattern and a bright line of a cursor 15b indicating the boundary between a plated part (c) and a non-plated part (d) are shown on the CRT screen. The position of the part measured is compared with the bright lines 15a and 15b of a reference pattern to measure a plating deviation. A measurement electric signal is divided into three color elements, red, green and blue and compared with three elements of the reference part to measure a color tone deviation. Thus, a measured image is compared with a reference pattern by computer processing thereby enabling measurement of the plating deviation, color tone deviation, contamination and the like at a high speed.
申请公布号 JPS63151841(A) 申请公布日期 1988.06.24
申请号 JP19860298841 申请日期 1986.12.17
申请人 NIPPON DORAIKEMIKARU KK;MITSUI HAITETSUKU:KK 发明人 ASAKINO KUNIHIRO;KURODA NAOYUKI;FUKUDA KENICHI;HINAMI TERUHIDE
分类号 H01L21/66;G01B11/00;G01N21/88;G01N21/93;G01N21/94;G01N21/956;H01L23/50 主分类号 H01L21/66
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