| 摘要 |
PURPOSE:To accurately and quantitatively analyze an element to be analyzed, by a method wherein a calibration curves are stored with respect to various elements and a preparatorily calculated quantitatively determined value is compared with a preset value to select the calibration curve suitable for the content of the element. CONSTITUTION:Data based on the spectrum lines of standard specimens of various elements are preliminarily stored in a calibration curve memory 6. The set value of the content of an element to be analyzed is preparatorily set by a setting device 8 and a calibration curve for low concn. having good analytical sensitivity is selected by a calibration curve selection circuit 14 to be inputted to a quantitatively determined value calculation circuit 10. Then, the element to be analyzed is spectrally measured using plasma beam by a spectral photometric part 4 to be inputted to the quantitatively determined value calculation circuit 10. A quantitatively determined value is calculated from the spectral photometric value by said calibration curve. Next, the quantitatively determined value is compared with the set value by a result judge circuit 12 and, when the quantitatively determined value is larger than the set value, a calibration curve for high concn. suitable for the content of the element to be analyzed is selected by the calibration curve selection circuit 14 to be inputted to the quantitatively determined value calculation circuit 10 and the content-of-the element compatible calibration curve is obtained. Since the calibration curve suitable for the content of the element to be analyzed is automatically selected, quantitative analysis can be performed with high accuracy.
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