| 摘要 |
PURPOSE:To enable detection without requiring additional work such as remachining, eliminating problems of boring involved, vacuum leakage and the like, by shutting down a super low pressure area separately from an atmospheric pressure area both electrically and pressure-wise to detect a beam current. CONSTITUTION:A conductor 2 is set in a super low pressure area S1 demarcated from an external pressure environment with a partition 5 to catch a beam current 1 and one end of a coil 3 wound on the circumference of a ferrite rod 4 is connected to a conductor 2 while the other end thereof to the ground 8. A magnet force detecting section 6 which detects a magnetic force with the action of an electromagnetic induction and a measuring device 7 is set to convert the magnetic force received with the detecting section 6 in terms of beam current. Then, when the beam current 1 hits the conductor 2 and flows to the ground 8 passing through the coil 3, a supermagnetic force works on a ferrite rod 4 due to the electromagnetic force acting on the coil 3. This magnetic force works on the detecting section 6 with the action of an electromagnetic induction through the partition 5 and the magnetic force received by the detecting section 6 is detected with the measuring device 7. The results are converted in terms of beam current.
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