| 摘要 |
PURPOSE:To make it possible to carry out high-accuracy flow rate control of raw material gas in generating the raw material gas by heating a glass raw material solution put in a heating tank housed in a constant temperature bath, by setting a cooling means to absorb heat from the liquid raw material in the heating tank. CONSTITUTION:A device wherein a heating tank 2 is housed in a constant temperature bath 1, a liquid raw material (being supplied by a feed pipe from a storage container 5) put in the heating tank 2 is heated (heater 9) to >=the boiling point and vaporized raw material gas is transported to the outside of the constant temperature bath 1. A cooling means (e.g. heat pipe 7) to absorb heat from the liquid raw material in the heating tank 2 is set. The heat pipe 7 having one end positioned in the liquid raw material in the heating tank 2 and the other end exposed to the outside of the constant temperature bath 1 can be used as the cooling means. Temperature difference between the heating tank and atmosphere in the constant temperature bath is made by the cooling means, the raw material gas in the piping can be prevented from liquefying even in a small flow rate of the generated raw material gas and high-accuracy flow rate control can be performed. |
