AUTOMATIC SUBSTRATE CONTINUITY INSPECTION EQUIPMENT

摘要

PURPOSE:To obtain a fully automatic inspection equipment simple to operate and high in accuracy, by adding a position deviation detecting probe pin to a continuity inspection equipment to inspect a substrate continuously after positioning, detecting a position deviation of a reference pattern. CONSTITUTION:A substrate positioning mechanism 8 fixed on a base board 7 is provided with a substrate holder 9 adapted to carry a substrate by insertion and a continuity inspecting section having measuring heads 5a and 5b allowed to make a measuring probe pin abut on both sides of a substrate. A substrate position deviation detecting section is made up of a plurality of position deviation detecting probe pins for detecting a position deviation of the substrate erected on one of the measuring heads 5a and 5b. Magazines 11 and 12 are provided on both right and left sides of the continuity inspecting section on the base board 7 to house substrates inspected and yet to be inspected. A substrate is automatically conveyed with a transport mechanism 13 between the substrate holder 9 and the magazines to be inspected.