| 摘要 |
PURPOSE:To make it possible to increase the number of measuring pins having high-frequency characteristics by a method wherein two kinds of transmission line pairs are respectively formed in different layers of a multilayer substrate in such a way that the central axes of the line patterns of both coincide with each other when seen from the vertical direction to the substrate. CONSTITUTION:A microstrip line 102 for signal is formed of a metallized layer on the main surface on the side of the wafer of a thin film ceramic substrate 107 and an earthing electrode 104 is formed in the main surface on the side opposite to the wafer of the substrate 107. A dielectric layer 101 is deposited on this substrate 107. Moreover, a microstrip line 103 consisting of a metallized layer is formed on a substrate of a multilayer structure consisting of the substrate 107 and the layer 101. An independent microstrip line shielded from the line 102 is formed of the line 103, the layer 101 and the electrode 104. Moreover, the lines 102 and 103 are formed in such a way that the central axes thereof coincide with each other when seen from the vertical direction to the multilayered substrate. Accordingly, as there are not the lines 102 and 103 on the same plane, a decrease in the number of pins is not generated.
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