| 摘要 |
PURPOSE:To increase the transmission/reception efficiency, and to facilitate manufacture by providing a process cutting a single-plate piezoelectric element into rectangular divisions, a process disposing spacers, and a process fixing them by adhering, slicing a single piezoelectric element to a prescribed thickness, and immediately forming a front matching layer and a rear matching layer or a sound wave absorbing bodies. CONSTITUTION:The single-plate piezoelectric element 1 on upper and lower surfaces to which electrodes 2, 3 are formed, is cut into rectangular divisions, then spaces are disposed, and they are disposed between the front matching layer and the rear matching layer or between sound wave absorbing bodies. For example, a PZT plate 10 of 120mm length, 11mm width, 40mum thickness on both surfaces to which electrodes 20, 30 are formed is fixed on a substrate 40 for dicing with a wax 50, and the plate 10 is cut at the pitch of 235mum with the blade of 60mum thickness. Then, the rectangular elements and polyimid films of 25mum thickness, 20mm length, 300mum width are alternately disposed in the recessed parts 70a of a jig 70. And they are adhered onto the front matching layer 80 with an adhesive. As a result, the transmission/reception efficiency is increased and grating lob is made less. |
