ELECTRON EMITTING DEVICE

摘要

PURPOSE:To allow high integration by providing a control electrode on an electron emitting source via an insulating layer and providing a focusing electrode on this electrode via an insulating layer. CONSTITUTION:An insulating layer 1b and a metal layer 1c are partially laminated on a substrate electrode 1a to form an electron emitting element. The layer 1c is separated from the other region by an insulating region 1d. A control electrode 3 is provided on the region 1d via an insulating layer 2, and a focusing electrode 5 is provided on the electrode 3 via an insulating layer 4. According to this constitution, the ON-OFF of the electrons emitted from the layer 1c is controlled by the electrode 3. In addition, the ON-OFF of the electrons emitted from the layer 1c is controlled by the electrode 5. Accordingly, the electrode 3 and electrode 5 can be integrally manufactured on the same substrate, and high integration is allowed.