| 摘要 |
PURPOSE:To use an inexpensive DC or AC motor for angle control by arranging angle detection mark electrodes which have width smaller than the minimum width of angle detection electrodes so that they overlap one another completely in the stacking direction. CONSTITUTION:Position detection mark electrodes 23 which have width W3 smaller than the minimum width W2 of position detection electrodes 22 in a binary code array for position detection are arranged on the slide surface 21 of a position detecting element while overlapping the electrodes 22 with the minimum width W2 completely in addition to the detection electrodes 22 so that the pitch W4 is a minimum detection angle. Consequently, the angle control is performed by the inexpensive DC or AC motor without stepwise movement by a stepping motor. |
