| 摘要 |
PURPOSE:To decrease attachment of dust to a body to be measured and to improve the yield rate, by setting the body part to be measured, which is provided on a mounting stage, in a down blow state. CONSTITUTION:Air is sucked through an nozzle 22. Dust is removed through a filter 23. The air is made to flow to a loader part and a prober part through tubes 18 and 36. In the loader part 3, the clean air enters through a ventilating plate 15 from a nozzle 19. The clean air is jetted through a ventilating hole 16. The jetted clean air passes in a wafer cassette 10 and is guided in the direction of a floor. The air is made to pass through the bottom surface part of a grating structure 8a and exhausted to the outside of a cabinet. In the prober part 5, the clean air is jetted through nozzles 35a and 35b of a head plate 31. The clean air is blown to a measuring stage and guided in the direction of the floor. The air is exhausted to the outside of the cabinet through the bottom part of a grating structure 8b.
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