| 摘要 |
PURPOSE:To provide sufficient bending rigidity to a piezoelectric sheet, by adding a fine particulate solid composed of ceramic to a polymer piezoelectric material of which is formed a piezoelectric film constituting the piezoelectric sheet. CONSTITUTION:A piezoelectric sheet 2 is formed into a bimorph type by mutually adhering thin piezoelectric films 8 through electrodes 7. The film 8 is formed by adding a fine particulate solid 8b made of an inorg. piezoelectric material such as piezoelectric ceramic to a polymer piezoelectric material 8a such as a vinylidene fluoride/trifluoroethylene copolymer. The electrodes 7 each formed of a conductive metal membrane so as to take out piezoelectric charge are applied to the outer surfaces of the film 8 by vapor deposition. As the film 8 becomes thinner, the piezoelectric effect becomes larger but the film 8 composed only of the polymer material is low in rigidity and can not be used. Then, the solid 8b is added to provided rigidity to the film 8 itself and, by this method, the film 8 can be processed into a membrane form and can hold sufficient bending rigidity and can be sufficiently used as a sensor.
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