| 摘要 |
PURPOSE:To prevent attached cutting coil from atomized scattering in a magnetic chuck having a plurality of fluid jet portions in a face plate by providing a speed reduction member having a plurality of fine air paths to reduce jet fluid speed. CONSTITUTION:When a workpiece adsorbed to a working surface 18 by a plurality of pole pieces 24 is released, pressurized air is supplied from an air path 30 to 44. A valve body 54 is pushed up against a spring 56 and air is jetted from an air jet portion 26 to release the workpiece from a magnetic absorbing force with the air pressure. The speed of pressurized air jet restrains air flow speed increasing at the same time as the workpiece is released since a speed reduction member 58 consisting of members sandwhiching a felt-like member having a plurality of fine air flow paths between fine meshed gauzes is mounted to close an opening in a first position 48. Thus, cutting oil and others attached to the fluid jet portion 26, working surface 18, magnetic body 24, etc., can be prevented from atomized scattering.
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