发明名称 |
MICROWAVE ION SOURCE |
摘要 |
<p>In a microwave ion source utilizing a microwave and a magnetic field, a microwave introducing window has a multilayer structure of plates with different dielectric constants, a magnetic circuit is arranged to generate a magnetic field having a higher intensity than that defined by ECR (Electron Cyclotron Resonance) conditions so as to form a narrow high-density plasma, an ion extraction electrode has an ion extraction window whose contour falls within a center region of the narrow high-density plasma.</p> |
申请公布号 |
CA1238415(A) |
申请公布日期 |
1988.06.21 |
申请号 |
CA19850483559 |
申请日期 |
1985.06.10 |
申请人 |
NIPPON TELEGRAPH AND TELEPHONE CORPORATION |
发明人 |
TORII, YASUHIRO;MATSUO, SEITARO;WATANABE, IWAO;SHIMADA, MASARU |
分类号 |
H01J37/08;H01J27/08;H01J27/16;H01J27/18;H01L21/265;(IPC1-7):H01J27/18 |
主分类号 |
H01J37/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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