发明名称 FACE-DOWN BONDING
摘要 PURPOSE:To align mutual positions of an IC chip element and a circuit substrate easily by aligning the IC chip element with the circuit substrate by an infrared see-through method. CONSTITUTION:After mutual alignment between an IC chip element 1 which has an infrared light transmitting chip forming substrate 2 and non-light- transmitting pad electrodes 3 lead out from the substrate 2 and a circuit substrate 10 on which the chip element 1 is mounted is performed by an infrared see-through method, face-down bonding is carried out. By the infrared radiation 4 which is transmitted through the IC chip element 1, the patterns of the non- light-transmitting pad electrodes 3 are seen-through and, further, protruding electrodes against which the pad electrodes 3 are pressed are also seen-through. With this constitution, a highly accurate mechanical feeder can be eliminated and the mutual alignment at the time of bonding can be performed easily and economically.
申请公布号 JPS63148650(A) 申请公布日期 1988.06.21
申请号 JP19860297134 申请日期 1986.12.12
申请人 FUJITSU LTD 发明人 YOKOUCHI KISHIO
分类号 H01L21/60 主分类号 H01L21/60
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