| 摘要 |
<p>PURPOSE:To obtain a color filter with good operability by exposing a photosensitive resin film which is formed on a substrate to a specific pattern, injecting a spray of dyeing liquid from a nozzle and cleaning it, and performing a fixation process. CONSTITUTION:The photosensitive resin film is formed on the substrate and exposed to the specific pattern. A spray of the dyeing liquid is injected over the photosensitive resin film from the nozzle and cleaned, and the fixation process is carried out to obtain a color filter. When the photosensitive resin film is water-soluble, dyeing liquid is used and when the film is soluble in an organic solvent, dyeing liquid which uses the organic solvent is used. Further, the dyeing liquid can be circulated, and an extremely fine filter (of, preferably, 0.1-1 mu) may be provided therein. Thus, the dyeing liquid is injected for dyeing, so dust produced in development is prevented from sticking on the pattern surface.</p> |
