| 摘要 |
PURPOSE:To accurately detect the time when the removal treatment of a surface layer formed on a substrate is completed, as long as the surface layer can transmit the light, by a method wherein an object to be treated is illuminated by the light containing a wavelength component capable of being transmitted through the surface layer and the intensity of reflected light or transmitted light is detected for a specific type of data processing. CONSTITUTION:When a surface layer formed on a substrate for an object W to be treated is to be removed after a prescribed surface treatment, the object W to be treated is illuminated by the light containing a wavelength component capable of being transmitted through said surface layer, and the intensity of reflected light or transmitted light from the object W to be treated is detected. A component containing the cycle changing a reference which depends on the treatment speed for a removal treatment and on the wavelength of illuminated light is obtained from a first data determined in accordance with the changing with the passage of time of said intensity in the form a value which is changed at intervals according to the cycle changing the reference. Furthermore, the level of a second data determined in accordance with the change with the passage of time of said value is compared with a prescribed threshold value. The time when the removal treatment has been completed is detected on the basis of the result of this comparison. |
