| 摘要 |
PURPOSE:To attain working with high accuracy on a thin film coil while maintaining flatness of forming previously an insulator made of a pattern obtained through inversion of the pattern of said thin film coil on an insulated layer, and stacking a conductive material to fill the area between insulators to shape this conductive material for production of the thin film coil. CONSTITUTION:An insulator contains a pattern obtained by inverting the pattern of a thin film coil formed on an insulated layer is preliminarily formed. A conductive material is applied on the entire surface of the insulator by applying a bias sputtering process while flattening the said material. The conductive material is stacked between insulators together with eliminating the conductive material out of undesired areas for production of a thin film coil. In other words, an insulator 9 with which the minute processing is possible is used for production of a space where a thin film coil 10 is set. then the conductive material is stacked into the space formed between the insulators 9 for production of the coil 10. In such a way, a minute space can be formed between coils 10, and furthermore, the surface of the coated conductive material is also flattened. Thus the coil 10 of a magnetic head is produced under the control of high accuracy.
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