| 摘要 |
PURPOSE:To speed up formation of a cross margin by removal of an adhered conductive layer with a device for removing the adhered conductive layer by a YAG laser by adopting a rotary polyhedral mirror in place of a reciprocating scanning means of laser light using an oscillation type mirror. CONSTITUTION:A YAG laser oscillator 11 which is so controlled as to make continuous oscillation at a low level near the workable threshold is provided. An optical system which is so set that laser light 19 passes a collimator 12 for decreasing the spreading angle of the laser light, a reflecting mirror 13, the rotary polyhedral mirror 14 and an ftheta lens 17 and arrives at a laser scanning area 5 on the surface of a film 1 adhered with the conductive layer and fed at a high speed is provided. The inclination angle computed from the feeding and traveling speed of the film 1 and the scanning speed of the laser light 19 as factors is maintained at the reflecting axis of the polyhedral mirror. The laser light scanning area orthogonal with the vertical margin is, therefore, substantially obtd. and the operation at a high speed in a wide range is permitted. Adaptability is widened and the working efficiency is improved. |
